On September 12, 2020, China Electrotechnical Society organized an video meeting to certify the scientific and technological achievement of "Basic Theory, Key Technology and Engineering Application of Broadband Wide Range Current Sensor Chip", a project jointly completed by EEA of Tsinghua University and Sichuan Energy Internet Research Institute of Tsinghua University. The certification meeting was presided over by Dr. Gao Wei, director of the Consulting Section of the Society. Professor Kang Chongqing, dean of EEA of Tsinghua University and president of Sichuan Energy Internet Research Institute of Tsinghua University delivered a speech on behalf of the units.

The certification committee is chaired by Cheng Shijie, academician of Huazhong University of Science and Technology, and vice-chaired by Wang Qiuliang, academician of Institute of Electrical Engineering, Chinese Academy of Sciences. Experts from Shanghai Jiaotong University, China Electric Power Research Institute, Chongqing University, Electric Power Research Institute of Hubei Electric Power Co., Ltd. and Research Institute of China Southern Power Grid carefully listened to the report of the project team and examined relevant materials for certification. After a comprehensive inquiry and discussion, experts agreed that the project has made remarkable innovations and technological breakthroughs in the basic theory of miniature wide-band large-range tunneling magnetoresistive magnetic field/ current sensing, chip preparation, development of a series of sensing devices and equipment application, leading the development and progress of magnetic field/ current sensing technology, and the overall technology has reached the international leading level.

Professor He Jinliang and Associate Professor Hu Jun from EEA of Tsinghua University, Associate Dean Liu Yi and Associate Researcher Ouyang Yong from Sichuan Energy Internet Research Institute of Tsinghua University attended the certification meeting on behalf of the project team. The basis of panoramic deep information perception of energy and power network is the intelligent sensing technology; with the rapid development of energy Internet and intelligent power equipment, the characteristics of wide-band and wide-range sensing of electrical parameters of energy power system and equipment are put forward, and the sensor is required to be small in size, low in cost, and easy for distributed installation, operation and maintenance. For this reason, the project team has worked for more than 10 years since 2009 with the support of the National Natural Science Foundation and the Key Basic Research and Development Program, aimed to satisfy the demand for wide-band and wide-range current sensing, studied the basic theory, key technology and engineering application of wide-band wide-range current sensing chip based on tunneling magnetoresistive effect, and the world-leading miniature magnetic field/ current sensing chip and sensing device, and finally realized remarkable innovations and technological breakthroughs.

The achievement of the project establishes the single domain model and performance control theory of tunneling magnetoresistive sensor chip, and reveals the influence of magnetoresistive internal materials, microstructure and other factors on the main performance of the sensor chip; it proposes a method for optimizing and designing the material parameters and structure of high performance tunneling magnetoresistive sensor chips, develops a series of tunneling magnetoresistive sensing chips with high precision, large dynamic range and wide frequency response, and realizes the industrialized manufacture of MEMS, of which the chip size is less than 3mm, and the performance reaches the dynamic range of 0.1 渭 T ~ 0.2T and the frequency response range is DC~ 100 MHz; based on the tunneling magnetoresistive sensor chip, it develops a wide-band wide-range current sensing device for multi-application scenarios, solves the key problems in magnetic field-current conversion and current measurement accuracy, frequency response, anti-interference and reliability, etc. and realizes the high-precision current measurement covering DC~100 MHz frequency and a measurement range from 100 渭 A to 100 Ka.

The project achievement has been tested or calibrated by Chinese Academy of Metrology, State Grid Metering Centre, BACL Laboratory, CEPREI, China Research Institute of Test Technology, etc., tested on site in State Grid, China Southern Power Grid, oil and gas fields and subway DC systems, and widely applied in the business scenarios such as intelligent sensing of various power equipment states. Through extensive cooperation with the Digital Power Grid Research Institute of China Southern Power Grid, Guangzhou Baiyun Electric Appliance, Xiamen Huadian Switches, Sichuan Zhongguang Lightning Protection, Xi'an Electrical Lightning Arresters, Jiangsu Zhongtian Jiangdong Hardware, Chengdu Electric Power Hardware of Power China, Pinggao Electrical and other industrial units, it realizes the industrialized application of tunneling magnetoresistive sensor chips and sensing devices in intelligent power equipment such as transmission lines, distribution lines, high voltage circuit breakers, surge protectors and lightning arresters, etc. The practical application shows that the project achievement can be extensively applied with outstanding performance indicators, which effectively improves the intelligent level of power grid system and equipment, and has achieved remarkable economic and social benefits.